I cannot able to Load Tag Template sheet, below error comes

Have you tried using the ALIM Export tool to export Tag Templates into an .xlsx sheet?  You can then use that same .xlsx sheet as a template for your import.    

Look at the Tag Templates tab in your import workbook. There needs to be a column named "Tag Name" on that sheet. That particular column can be populated with anything or left empty. But it must be present. If there are other issues revealed after changing that, you can export to the tag templates to get a worksheet with the correct column names.

The provisioning.xml file contains the data points required for each sheet. You can view the column mappings in the Import/Export tool.